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Al2O3 ZrO2 ZTA AlN Si3N4 SiC Machineable Ceramic
Tarso Number T-97 T998-A T1 T-999 T-ZrO2(Y) T-ZrO2(Mg) T-ZTA85 T-AN180 T-AN200 T-AN220 T-SiN T-SSiC T-SiSiC T-MC
Color White Ivory Ivory Ivory-White White Yellow-white Off-white Gray Gray Beige Black Black Black White
Main Content Percentage 97% 99.8% 99.8% 99.9% 95% 96.50% 85% 96% 96% 97% x x x x
Main Characteristics Good for metallization/ Wear resistance Excellent anti-plasma property/high wear resistance High mechanical strenth/ good wear and heat resistance High mechacnial strength & toughness/ good wear and corrosion resistance/ good thermal shock resistance Enhanced fracture toughness/ good mechanical strength/ wear and corrossion resistance High thermal conductivity/ excellent thermal shocking resistance/ excellent plasma resistance Light weight/ wear resistance/ high heat resistance High temperature strength/ high chemical resistance/ good thermal conductivity Good chemical and abrasive resistance Precision machinability/ excellent electrical and heat insulation
Main Applications IC packing/ Electronic parts/ Mechanical parts Semiconductor equipment parts/ Wear & corrosion resistant parts Wear and heat resistant parts Wear & heat resistant parts at high temperature when mechanical strength is required Heat dissipating parts/ Plasma resistant parts Heat,wear and corrosion resistant parts Semiconductor equipment parts/ sealing parts/ anti-heat parts Abrasive and corrosion resistant parts Electrical and heat insulation parts
Bulk Density g/cc ASTM-C20 3.70  3.92  3.92  3.95  6.02  5.72  4.15  3.30  3.30  3.28  3.20  3.15  3.02  2.52 
Water Absorption % ASTM-C373
Mechanical Characteristics Vickers harness
(load 500g)
GPA ASTM C1327-03 13.8  17.3  18.0  18.5  13.0  12.0  16.0  10.0  9.5  9.0  13.9  28.0  20.0  x
Flexural strength Mpa ASTM C1161-02c 350 350 350 350 1250 900 500 ≥350 ≥325 280 610 380 250 94
Compressive strength Mpa ASTM C73 2250 2450 2500 2600 5690 1900 2580 2500 2500 x 3850 3900 x 345
Young's modulus of elasticity Gpa ASTM C1198-01 330 360 365 380 210 200 337 320 320 320 290 410 330 25.5
Poisson's ratio x ASTM C1198-01 0.23  0.23  0.22  0.23  0.31  0.30  0.23  0.24  0.24  0.24  0.28  0.14  x 0.29
Fracture toughness Mpa·m1/2 ASTM C1421-01b
(kevron notched beam)
3 4~5 4~5 4~5 6~7 9~10 x x x x 5 4 x x
Thermal chracteristics Coefficient of linear thermal expansion 40~400 x10-6/ ASTM C372-94 7.1  8.2  8.1  8.2  10.0  9.0  7.0  4.8  4.6  4.5  2.6  4.0  4.5  9.0 
Thermal conductivity 20 W/(m·k) ASTM C408-88 25 30 32 32 3 3 24 180 200 220 23 120 45 1.46
Specific heat J/(kgs·k)x103 ASTM E1269 0.78  0.80  0.80  0.78  0.46  0.47  x 0.74  0.74  0.76  0.66  0.65  x 0.79 
thermal shocking resistance Note 1 200 220 220 220 x 350 x x x x 550 x x x
Electrical characteristics Volum resistivity 20 Ω·cm ASTM D257-99 1014 1015 1015 1015 x 1011 x 1014 1014 1013 1014 102~106 x 1017
Dielectric strength KV/mm ASTM D149-97 16 17 17 17 x x x 15 15 15 13 x x 45
Dielectric constant (1Mhz) x ASTM D150-98
(1MHz)
9 9.8 9.8 9.7 x x x 9 8.8 8.6 x x x 6.01
Loss tangent (x10-4) ASTM D150-98
(1MHz)
3 1 1 1 x x x 5 5 3 x x x 4
Chemical characteristics Nitric acide(60%) 90 Weight loss (mg/cm2/day) x 0.12 0.05 x x 0 x x x x x <1.0 x x x
Sulphuric acide(95%) 95 x 0.30 0.23 x x 0.04 x x x x x 0.40 x x x
Caustic Soda (30%) 80 x 0.90 0.04 x x 0.08 x x x x x 0.36 x x x


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